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Design, Simulation and Analysis of Perforated RF MEMS Capacitive Shunt Switch

Author(s):

K. Srinivasa Rao*, Ch. Gopichand, Koushik Guha, N. P. Maity, Reshmi Maity, Santanu Maity, D. Prathyusha and K. Girija Sravani   Pages 1 - 10 ( 10 )

Abstract:


This paper presents the design and simulation of double bridge-type capacitive RF MEMS switch by using FEM Tool. It is mainly concentrated on a low pull-in voltage, capacitance, and RF analysis. The beam is considered as a gold metal having the length of 595 μm along with the 1μm thickness and the dielectric is taken as Silicon nitride (Si3N4) by using Ashby’s method. The nonuniform meandering technique and perforations are used to reduce the pull-in voltage, by changing different beam thickness, air gap and materials. The pull-in voltage of the proposed RF MEMS switch is 1.2 V. The scattering parameters are simulated by using Ansoft HFSS software. The simulation results of S-parameters such as return loss, insertion losses are, -19.27 dB and -0.20dB. The switch having good isolation is -63.94 dB at 8 GHz. The overall switch is designed with different beam thickness, various gap, and different materials to identify the best performance of the switch for lowfrequency applications i.e X-bands.

Keywords:

Spring constant, pull-in voltage, switching time, COMSOL.

Affiliation:

MEMS Research Center, Department of ECE, Koneru Lakshmaiah Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur-522502, Andhra Pradesh, MEMS Research Center, Department of ECE, Koneru Lakshmaiah Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur-522502, Andhra Pradesh, Department of ECE, National Institute of Technology, Silchar, Assam, Department of ECE, Mizoram University, Aizwal, Mizoram, Department of ECE, Mizoram University, Aizwal, Mizoram, Department of ECE, Tezpur University, Tezpur, Assam, MEMS Research Center, Department of ECE, Koneru Lakshmaiah Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur-522502, Andhra Pradesh, MEMS Research Center, Department of ECE, Koneru Lakshmaiah Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur-522502, Andhra Pradesh



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