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Design of Piezoresistive based Microbridge for MEMS Pressure Sensor

[ Vol. 12 , Issue. 1 ]

Author(s):

K. Girija Sravani*, G. Sai Lakshmi and K. Srinivasa Rao   Pages 68 - 77 ( 10 )

Abstract:


In this paper, we have designed and simulated three types of microbridges using COMSOL MultiphysicsFEM tool, the mechanical behavior of three microbridges and its response is analyzed based on the non-linearity and sensitivity parameters. Finally, the proposed microbridge is integrated with an electro-osmotic pressure sensor to measure the variation in glucose concentration levels.

Keywords:

Diabetes, piezoresistive, piezoelectric, capacitive principle, microbridge, electroosmosis, MEMS.

Affiliation:

MEMS Research Center, Department of Electronics & Communication Engineering, Koneru Lakshmaih Education Foundation (Deemed to be University), Green Fields, Vaddewaram-522502, Guntur, MEMS Research Center, Department of Electronics & Communication Engineering, Koneru Lakshmaih Education Foundation (Deemed to be University), Green Fields, Vaddewaram-522502, Guntur, MEMS Research Center, Department of Electronics & Communication Engineering, Koneru Lakshmaih Education Foundation (Deemed to be University), Green Fields, Vaddewaram-522502, Guntur



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