Salah Eldeen Osman and Musaab Zarog* Pages 62 - 67 ( 6 )
Electrothermal microactuators are very promising for wide range of Microelectromechanical Systems (MEMS) applications due to the low voltage requirement and large force produced. A new optimized V-beam electrothermal micro actuator was implemented in variable optical attenuator. In this work, Particle Swarm Optimization (PSO) technique is proposed to design the V-shaped beam. The approach has successfully improved both angular displacement & output force of the microactuator. Entropy generation rate was used as optimization criteria.
PSO, entropy, variable optical attenuator, microactuators, RF MEMS, genetic algorithms.
Department of Mechanical Engineering, Sudan University of Science and Technology, Khartoum, Department of Mechanical Engineering, Sultan Qaboos Univeristy, Muscat