Hassan Saffari, Reza Askari Moghadam* and Javad Koohsorkhi Pages 80 - 87 ( 8 )
Background: RF MEMS switches can be used in radars, wireless systems, communication systems, phase shifters and switch matrices in order to achieve low power consumption, high isolation, small size and weight.
Objective: This paper reports a low actuation voltage Capacitive Shunt RF MEMS Switch with two flexures, based on rotated serpentine spring concept.
Method: The switch is designed on a CPW line with an impedance of 50 Ω. The dielectric is used is silicon nitrate with the thickness of 0.1 µm. Also, a cantilever beam switch and a switch with the serpentine spring structure based on meanders are simulated with the Comsol software and compared with the proposed switch.
Conclusion: The results show actuation voltages of 15.89 V, 10 V and 7.755 V for the cantilever beam structure, serpentine spring structure and the proposed switch, respectively. RF scattering parameters are simulated by HFSS.
Result: The results show that the return loss is -0.18 at 9.3GHz and the isolation is -37 dB at 9.3 GHz.
RF MEMS switch, low actuation voltage, spring structure, RF signal, microstrip, radio frequency.
Faculty of New Sciences and Technologies, University of Tehran, Tehran, Faculty of New Sciences and Technologies, University of Tehran, Tehran, Faculty of New Sciences and Technologies, University of Tehran, Tehran